EpiRAS® TT
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EpiRAS® TT is a multipurpose in-situ monitor of epitaxial growth of cubic semiconductors. The system combines two spectroscopic optical techniques: Reflectance Anisotropy Spectroscopy (RAS), sometimes called Reflectance Difference Spectroscopy (RDS), and spectroscopic reflectance (sR), as well as Emissivity Corrected Pyrometry.
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